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发明名称
基板保持构件、基板搬运臂及基板搬运装置
摘要
申请公布号
TWI436446
申请公布日期
2014.05.01
申请号
TW099112733
申请日期
2010.04.22
申请人
东京威力科创股份有限公司 日本
发明人
中野征二;松下道明;饭田成昭;榎木田卓;森川胜洋
分类号
H01L21/683;H01L21/677
主分类号
H01L21/683
代理机构
代理人
林志刚 台北市中山区南京东路2段125号7楼
主权项
地址
日本
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