| 摘要 |
PROBLEM TO BE SOLVED: To provide a light deflector of high fracture limit.SOLUTION: A BOX layer silicon oxide film 43 is formed on an outer circumferential frame part 17, and a fixed frame part 11 is formed on the BOX layer silicon oxide film 43. Arms 14c and 14d are connected to the fixed frame part 11. The arms 14c and 14d are connected to a beam, and the beam is connected to a mirror. The outer circumferential frame part 17, fixed frame part 11, arms 14c and 14d, beam, and mirror are made of silicon. An inside wall 17s of the outer circumferential frame part 17 has a rugged shape having a surface roughness greater than that of each of an inside wall of the fixed frame part 11, side walls of the arms 14c and 14d, a side wall of the beam, and a side wall of the mirror. |
