通过循环性ＣＶＤ或ＡＬＤ制备金属氧化物薄膜的方法,申请号TW098111881-传众专利搜索

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发明名称	通过循环性ＣＶＤ或ＡＬＤ制备金属氧化物薄膜的方法
摘要
申请公布号	TWI435947	申请公布日期	2014.05.01
申请号	TW098111881	申请日期	2009.04.09
申请人	气体产品及化学品股份公司美国	发明人	金武性;雷新建;史宾西　丹尼尔　Ｐ;杨相铉
分类号	C23C16/448;C23C16/40	主分类号	C23C16/448
代理机构		代理人	陈展俊台北市大安区和平东路2段203号4楼之2;林圣富台北市大安区和平东路2段203号4楼之2
主权项
地址	美国

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