发明名称 Indium sputtering method and materials for chalcopyrite-based material usable as solar cell absorber layers
摘要 A solar cell includes an absorber layer formed of a CIGAS, copper, indium, gallium, aluminum, and selenium. A method for forming the absorber layer provides for using an indium-aluminum target and depositing an aluminum-indium film as a metal precursor layer using sputter deposition. Additional metal precursor layers such as a CuGa layer are also provided and a thermal processing operation causes the selenization of the metal precursor layers. The thermal processing operation/selenization operation converts the metal precursor layers to an absorber layer. In some embodiments, the absorber layer includes a double graded chalcopyrite-based bandgap.
申请公布号 US8703524(B1) 申请公布日期 2014.04.22
申请号 US201213689091 申请日期 2012.11.29
申请人 TSMC SOLAR LTD. 发明人 YEN WEN-TSAI;WU CHUNG-HSIEN;CHEN SHIH-WEI;LEE WEN-CHIN
分类号 H01L21/00 主分类号 H01L21/00
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