| 摘要 |
PROBLEM TO BE SOLVED: To provide a laser scanning microscope device that has high in-plane resolution, high resolution with respect to a height out of the plane and to refractive index distribution, and that allows easy measurement and observation with a wide measurement range.SOLUTION: A combining optical system 1 combines two laser beams having wavelengths different from each other and emits the combined beam. An acoustooptic element 3 modulates the respective laser beams into the beams having two frequencies, and emits the beams to a different direction from each other. A two-dimensional scanning device 6 two-dimensionally scans the beams, separates a part of the beams with a beam splitter 7, and light receiving elements 81, 83 photoelectrically convert the beams and send a beat signal of each of the beams. Pupil transmission lens systems 5, 10 bring the beams from the combining optical system 1 close to each other, and emit the beams to an object S through an objective lens 17. Light receiving elements 91, 93 photoelectrically convert the reflection beams from the object S to send a beat signal of each of the beams. A signal comparator 15 detects phase differences obtained based on beat signals from the light receiving elements 81, 83, 91 and 93, and a data processing part 16 obtains information of the object S. |
