发明名称 |
AUTOMATIC LITHIUM TARGET REGENERATING APPARATUS AND AUTOMATIC LITHIUM TARGET REGENERATING METHOD |
摘要 |
Provided are an automatic lithium target regenerating apparatus and an automatic lithium target regenerating method, which are equipped with a measurement function of a lithium film thickness of a lithium target, and may automatically regenerate the consumed lithium target by moving a vapor deposition source to the lithium target. An automatic lithium target regenerating apparatus (106) is allowed to automatically regenerate lithium of a lithium target. The automatic lithium target regenerating apparatus (106) includes a lithium vapor deposition unit (1) for vapor-depositing the lithium on the lithium target. The lithium vapor deposition unit (1) is allowed to vapor-deposit the lithium on the lithium target by moving to the lithium target side. |
申请公布号 |
KR20140045983(A) |
申请公布日期 |
2014.04.17 |
申请号 |
KR20147001754 |
申请日期 |
2012.05.31 |
申请人 |
CANCER INTELLIGENCE CARE SYSTEMS, INC. |
发明人 |
FUJII RYO;NAKAMURA MASARU;IMAHORI YOSHIO;HOSHI MASAHARU |
分类号 |
H05H6/00;C23C14/14;G21K5/08;H05H3/06 |
主分类号 |
H05H6/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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