发明名称 |
METHOD OF PRODUCING MATERIAL FOR VAPOR DEPOSITION MASK, METHOD OF MANUFACTURING VAPOR DEPOSITION MASK |
摘要 |
PROBLEM TO BE SOLVED: To provide a method of producing a material for manufacturing a vapor deposition mask in which both high definition and lightweight can be satisfied even when it is up-sized.SOLUTION: A material for vapor deposition mask formed by laminating a metal mask provided with slits and a thermosetting resin layer located on the surface of the metal mask is produced by a step for coating one side of a metal plate with a thermosetting resin, a step for forming a thermosetting resin layer by temporarily curing or curing the thermosetting resin thus applied on condition that an oxide film is not formed on the surface of the metal plate, a step for forming a metal mask by etching the metal plate from the other side and forming slits penetrating only the metal plate, and a step for forming an oxide film on the surface of the metal mask, by heating the metal mask and the thermosetting resin layer located on one side thereof. |
申请公布号 |
JP2014067500(A) |
申请公布日期 |
2014.04.17 |
申请号 |
JP20120210179 |
申请日期 |
2012.09.24 |
申请人 |
DAINIPPON PRINTING CO LTD |
发明人 |
OBATA KATSUYA;KENMORI HIDESUKE;TAKEDA TOSHIHIKO |
分类号 |
H05B33/10;C23C14/04;H01L51/50 |
主分类号 |
H05B33/10 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|