发明名称 METHOD OF PRODUCING MATERIAL FOR VAPOR DEPOSITION MASK, METHOD OF MANUFACTURING VAPOR DEPOSITION MASK
摘要 PROBLEM TO BE SOLVED: To provide a method of producing a material for manufacturing a vapor deposition mask in which both high definition and lightweight can be satisfied even when it is up-sized.SOLUTION: A material for vapor deposition mask formed by laminating a metal mask provided with slits and a thermosetting resin layer located on the surface of the metal mask is produced by a step for coating one side of a metal plate with a thermosetting resin, a step for forming a thermosetting resin layer by temporarily curing or curing the thermosetting resin thus applied on condition that an oxide film is not formed on the surface of the metal plate, a step for forming a metal mask by etching the metal plate from the other side and forming slits penetrating only the metal plate, and a step for forming an oxide film on the surface of the metal mask, by heating the metal mask and the thermosetting resin layer located on one side thereof.
申请公布号 JP2014067500(A) 申请公布日期 2014.04.17
申请号 JP20120210179 申请日期 2012.09.24
申请人 DAINIPPON PRINTING CO LTD 发明人 OBATA KATSUYA;KENMORI HIDESUKE;TAKEDA TOSHIHIKO
分类号 H05B33/10;C23C14/04;H01L51/50 主分类号 H05B33/10
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