发明名称 |
METHOD FOR POSITIONING A TRANSFER UNIT, METHOD FOR CALCULATING POSITIONAL DEVIATION AMOUNT OF AN OBJECT TO BE PROCESSED, AND METHOD FOR CORRECTING TEACHING DATA OF THE TRANSFER UNIT |
摘要 |
In a method for positioning a transfer unit including, support pins for supporting object, and a pick having at a leading end thereof a detection unit for detecting presence or absence of the object, a height reference position of the pick is determined by detecting an upper edge of one of the support pins by the detection unit. A forward moving angle of the pick is corrected by obtaining a deviation angle between a radial direction of the mounting table passing through the corresponding support pin and a forward moving direction of the pick. A forward movement starting point of the pick is corrected by obtaining a horizontal deviation distance between the radial direction of the mounting table and the forward moving direction of the pick. A forward moving reference amount of the pick is obtained from coordinates of the corresponding support pin. |
申请公布号 |
US2014107825(A1) |
申请公布日期 |
2014.04.17 |
申请号 |
US201314043725 |
申请日期 |
2013.10.01 |
申请人 |
TOKYO ELECTRON LIMITED |
发明人 |
KUBODERA MASATO;KIKUSHIMA HIROHITO;YAMAGUCHI HIROFUMI;SASAKI YOSHIAKI;YU MENG YIAU |
分类号 |
G05B19/418 |
主分类号 |
G05B19/418 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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