发明名称 SOLID-STATE IMAGE SENSOR AND METHOD OF MANUFACTURING THE SAME
摘要 PROBLEM TO BE SOLVED: To improve the yield of a solid-state image sensor by suppressing intrusion of contaminants into an interface between an organic film and a counter electrode.SOLUTION: A method of manufacturing a solid-state image sensor comprises: setting a first shadow mask 5, which exposes a plurality of pixel electrodes 12 by one opening and covers a counter electrode connection electrode 13, to a substrate 10 provided with the pixel electrodes 12 and the counter electrode connection electrode 13; forming an organic layer 17 on the pixel electrodes 12 through the first shadow mask 5; forming a first counter electrode layer 21 on the organic layer 17 through the first shadow mask 5; and thereafter removing the first shadow mask 5 and forming a connection part 22 for electrically connecting the first counter electrode layer 21 and the counter electrode connection electrode 13.
申请公布号 JP2014067768(A) 申请公布日期 2014.04.17
申请号 JP20120210287 申请日期 2012.09.25
申请人 FUJIFILM CORP 发明人 SUZUKI HIDEYUKI
分类号 H01L27/146;H04N5/369 主分类号 H01L27/146
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