发明名称 |
SEMICONDUCTOR DEVICE, AND METHOD OF MANUFACTURING THE SAME |
摘要 |
PROBLEM TO BE SOLVED: To reduce a gate leakage current in a tunnel transistor.SOLUTION: According to an embodiment of the invention, a semiconductor device comprises: a gate electrode formed on a substrate via a gate insulating film; a source region of a first conductivity type; and a drain region of a second conductivity type which is opposite to the first conductivity type. The source region and the drain region are formed in the substrate so as to sandwich the gate electrode. A work function in a first region on the side of the source region in the gate electrode is shifted toward the first conductivity type as compared to a work function in a second region on the side of the drain region in the gate electrode. |
申请公布号 |
JP2014067958(A) |
申请公布日期 |
2014.04.17 |
申请号 |
JP20120213834 |
申请日期 |
2012.09.27 |
申请人 |
TOSHIBA CORP |
发明人 |
GOTO MASAKAZU |
分类号 |
H01L21/336;H01L21/265;H01L21/266;H01L21/28;H01L29/423;H01L29/49;H01L29/66;H01L29/78 |
主分类号 |
H01L21/336 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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