发明名称 SEMICONDUCTOR DEVICE, AND METHOD OF MANUFACTURING THE SAME
摘要 PROBLEM TO BE SOLVED: To reduce a gate leakage current in a tunnel transistor.SOLUTION: According to an embodiment of the invention, a semiconductor device comprises: a gate electrode formed on a substrate via a gate insulating film; a source region of a first conductivity type; and a drain region of a second conductivity type which is opposite to the first conductivity type. The source region and the drain region are formed in the substrate so as to sandwich the gate electrode. A work function in a first region on the side of the source region in the gate electrode is shifted toward the first conductivity type as compared to a work function in a second region on the side of the drain region in the gate electrode.
申请公布号 JP2014067958(A) 申请公布日期 2014.04.17
申请号 JP20120213834 申请日期 2012.09.27
申请人 TOSHIBA CORP 发明人 GOTO MASAKAZU
分类号 H01L21/336;H01L21/265;H01L21/266;H01L21/28;H01L29/423;H01L29/49;H01L29/66;H01L29/78 主分类号 H01L21/336
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