发明名称 IMPRINT MOLD, METHOD OF PRODUCING IMPRINT MOLD AND PATTERN MOLDING
摘要 PROBLEM TO BE SOLVED: To provide an imprint mold allowing easy release of an imprint mold from a transfer material without poor transfer of an uneven pattern to the transfer material or damage of the uneven pattern.SOLUTION: An imprint mold 130 is for transferring a pattern containing irregularities to a transfer material and has a substrate 133. On the upper surface of the substrate 133, an uneven pattern 132 for pattern transfer is formed. In a part of the upper surface of the substrate 133 adjacent to the uneven pattern 132, a release assisting pattern 131 which assists release of the transfer material after pattern transfer from the uneven pattern 132 is provided in a central part close to one side of the square substrate 133.
申请公布号 JP2014065231(A) 申请公布日期 2014.04.17
申请号 JP20120212696 申请日期 2012.09.26
申请人 TOPPAN PRINTING CO LTD 发明人 SOMA MUNEHISA
分类号 B29C59/02;B29C33/42;H01L21/027 主分类号 B29C59/02
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