Zinc oxide precursor and method of depositing zinc oxide-based thin film using the same
摘要
A zinc oxide (ZnO) precursor and a method of depositing a ZnO-based thin film using the same, with which a high-quality and high-purity ZnO-based thin film can be deposited. The ZnO precursor includes a mixture solvent containing at least two organic solvents which are mixed and a source material comprising diethyl zinc or dimethyl zinc which is diluted in the mixture solvent.
申请公布号
EP2719795(A1)
申请公布日期
2014.04.16
申请号
EP20130187630
申请日期
2013.10.08
申请人
SAMSUNG CORNING PRECISION MATERIALS CO., LTD.
发明人
PARK, SOOHO;PARK, JONGSE;YOO, YOUNG ZO;LEE, JOO YOUNG;KIM, SEO HYUN;YOON, GUN SANG;KIM, MYONG WOON;SHIN, HYUNG SOO;YOO, SEUNG HO;LEE, SANG DO;LEE, SANG ICK;YIM, SANG JUN