基板处理装置以及在该装置中传送基板的方法,申请号TW098112339-传众专利搜索

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发明名称	基板处理装置以及在该装置中传送基板的方法
摘要
申请公布号	TWI434367	申请公布日期	2014.04.11
申请号	TW098112339	申请日期	2009.04.14
申请人	细美事有限公司南韩	发明人	洪光珍;刘俊浩
分类号	H01L21/677;B65G49/07	主分类号	H01L21/677
代理机构		代理人	詹铭文台北市中正区罗斯福路2段100号7楼之1;萧锡清台北市中正区罗斯福路2段100号7楼之1
主权项
地址	南韩

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