METHOD FOR CLEANING DROPLET EJECTOR, CLEANER FOR CLEANING DROPLET EJECTOR, AND PARTICULATE MATERIAL PRODUCTION APPARATUS USING THE CLEANER

摘要

A cleaning method for cleaning a droplet ejector, which includes nozzles to eject a particulate material composition liquid, and a nozzle plate bearing the nozzles is provided. The cleaning method includes forming a substantially closed cleaning space outside the nozzles and the nozzle plate; supplying a cleaning liquid to the cleaning space so that the nozzles and the nozzle plate are contacted with the cleaning liquid; and vibrating the cleaning liquid when the nozzles and the nozzle plate are contacted with the cleaning liquid to clean the nozzles and the nozzle plate.