| 摘要 |
This spectral characteristic measurement device is provided with: a division optical system which divides measurement light fluxes respectively emitted from a plurality of measurement points located within a measurement region of an object to be measured into a first measurement light flux and a second measurement light flux; an imaging optical system which causes the first measurement light flux and the second measurement light flux to interfere with each other; a light path length difference imparting means which imparts a continuous light path difference distribution between the first measurement light flux and the second measurement light flux; a detection unit which detects the light intensity distribution of interference light; a processing unit which, on the basis of the light intensity distribution of the interference light detected by the detection unit, obtains an interferogram of the measurement points of the object to be measured, and acquires a spectrum by Fourier-transforming the interferogram; a conjugate plane imaging optical system which is disposed between the object to be measured and the division optical system and has a conjugate plane shared with the division optical system; and a periodicity imparting means which is disposed in the conjugate plane and imparts periodicity between the measurement light fluxes emitted from the plurality of measurement points. |
