COMPOSITE CHARGED PARTICLE BEAM DEVICE, AND THIN SAMPLE PROCESSING METHOD

摘要

PROBLEM TO BE SOLVED: To suppress a curtain effect accompanying a finishing processing and acquire a less-striped observation image formed by ion beam processing, even when thinning a sample having a structure such as a semiconductor device.SOLUTION: A composite charged particle beam device comprises: an FIB (Focused Ion Beam) lens barrel 1 irradiating a thin sample 7 with an FIB 1b; a GIB (Gas Ion Beam) lens barrel 3 irradiating with a GIB 3b; a sample table 5 for mounting the thin sample 7; first inclination means inclining the thin sample 7 around a first inclination axis 8a of the sample table 5 that exists in a plane of a first surface 21 orthogonal to an FIB irradiation axis 1a and formed by the FIB irradiation axis 1a and a GIB irradiation axis 3a; and second inclination means inclining the thin sample 7 around an axis orthogonal to the FIB irradiation axis 1a and the first inclination axis 8a.