| 摘要 |
An imaging optical unit serves for imaging an object field into an image field. An imaging beam path (AS) between the object field and the image field is subdivided into a plurality of partial imaging beam paths (TAS). The imaging optical unit is embodied such that the partial imaging beam paths (TAS) run between the object field and the image field in a manner completely separated from one another and guided by optical components (M1 to M6) of the imaging optical unit, that is to say that nowhere in the beam path between the object field and the image field do the partial imaging beam paths (TAS) impinge on identical regions of beam-guiding surfaces of the imaging optical unit. This results in an imaging optical unit in which a resolution capability, particularly in the production of micro- or nanostructured semiconductor components, is increased. |
