WIRE CURVATURE MONITORING SYSTEM DEDICATED TO WIRE SAW

摘要

PROBLEM TO BE SOLVED: To provide a wire curvature monitoring system dedicated to a semiconductor wire saw device.SOLUTION: The wire curvature monitoring system includes a sensor array configured so as to be positioned to neighbor a wire of a wire saw device. The sensor array is adapted to detect wire curvature and includes at least one of an inductive sensor, a capacitive sensor, and a contact sensor.