发明名称 |
STRUCTURED ILLUMINATION APPARATUS, STRUCTURED ILLUMINATION MICROSCOPY, AND STRUCTURED ILLUMINATION METHOD |
摘要 |
A structured illumination apparatus includes a light modulator being disposed in a light path of an exit light flux from a light source, and in which a sonic wave propagation path is arranged in a direction traversing the exit light flux; a driving unit generating a sonic standing wave in the sonic wave propagation path by giving a driving signal for vibrating a medium of the sonic wave propagation path to the light modulator; an illuminating optical system making at least three diffracted lights of the exit light flux passed through the sonic wave propagation path to be interfered with one another, and forming interference fringes of the diffracted lights on an observational object; and a controlling unit controlling a contrast of the interference fringes by modulating a phase of at least one diffracted light among the diffracted lights in a predetermined pitch. |
申请公布号 |
US2014092463(A1) |
申请公布日期 |
2014.04.03 |
申请号 |
US201314095453 |
申请日期 |
2013.12.03 |
申请人 |
NIKON CORPORATION |
发明人 |
NOMURA TATSUSHI;OSAWA HISAO;FUKUTAKE NAOKI |
分类号 |
G02B21/36;G02F1/11 |
主分类号 |
G02B21/36 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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