发明名称 ADHESIVE SHEET FOR SEMICONDUCTOR DEVICE PRODUCTION, SEMICONDUCTOR DEVICE, AND METHOD FOR PRODUCING SEMICONDUCTOR DEVICE
摘要 <p>The objective of the present invention is to provide an adhesive sheet that is for semiconductor device production, can be firmly affixed to the pedestal of a semiconductor wafer, and is such that the pedestal is easily separated from the semiconductor wafer. The present invention pertains to the adhesive sheet for semiconductor device production and used for affixing a semiconductor wafer to a pedestal, wherein the adhesive sheet has a first adhesive layer and a second layer having a lower adhesive strength than the first adhesive layer, and at least the peripheral section of the adhesive sheet for semiconductor device production is formed from a first adhesive layer.</p>
申请公布号 WO2014050663(A1) 申请公布日期 2014.04.03
申请号 WO2013JP75174 申请日期 2013.09.18
申请人 NITTO DENKO CORPORATION 发明人 UENDA,DAISUKE;ISHII,JUN
分类号 C09J7/00;C09J5/06;C09J9/02;C09J179/04;H01L21/304 主分类号 C09J7/00
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