发明名称 APPARATUS FOR SUPPLYING EVAPORATION MATERIAL AND APPARATUS FOR DEPOSITION HAVING THE SAME
摘要 Disclosed are an evaporation material supplying apparatus and a depositing apparatus including the same. The evaporation material supplying apparatus includes: a supply container which has a hollow part inside and receives an evaporation material in the hollow part; a supply pipe which is combined with one sidewall of the supply container to be connected to the hollow part of the supply container and discharges the evaporation material; a lifting plate which is arranged in the transverse direction of the hollow part to locate the evaporation material on the upper side thereof and moves up and down along the hollow part; and a mixing screw which is formed on the upper side of the lifting plate and mixes the evaporation material. The evaporation material supply device maintains the vacuum atmosphere of a vacuum chamber and continuously charges an evaporation source with the evaporation material.
申请公布号 KR20140039496(A) 申请公布日期 2014.04.02
申请号 KR20120105670 申请日期 2012.09.24
申请人 SUNIC SYSTEM. LTD. 发明人 JANG, TAE HUN
分类号 H01L51/56;C23C14/24 主分类号 H01L51/56
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