发明名称 |
Recycling of silicon kerfs from wafer sawing |
摘要 |
There is provided a method of cutting a silicon ingot and recycling residual material, comprising the steps of:
a) cutting a Si ingot using carbon-containing particles as abrasive material such that Si wafers and a residual material comprising Si kerfs and carbon-containing particles are obtained;
b) purifying the residual material such that purified Si kerfs and carbon-containing particles are obtained; and
c) adding the purified Si kerfs and carbon-containing particles to a reduction process producing Si,
the method being characterized in that the carbon-containing particles added in step a) is contains less than 0.25 ppm (w/w) boron and less than 0.5 ppm (w/w) phosphorus. |
申请公布号 |
EP2712844(A1) |
申请公布日期 |
2014.04.02 |
申请号 |
EP20120186221 |
申请日期 |
2012.09.27 |
申请人 |
FESIL SUNERGY AS |
发明人 |
NYGAARD, LARS;SKJOELBERG, EINAR MARTIN;CHRISTIANSEN, STEIN;ANDRESEN, BIRGER |
分类号 |
C01B33/025;C01B33/037 |
主分类号 |
C01B33/025 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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