| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for manufacturing a surface emitting laser array element, capable of eliminating a surface emitting laser element in which a blackening defect occurs, as a defective unit.SOLUTION: A method for manufacturing a surface emitting laser array element includes the steps of: forming a laminate including a selectively oxidized layer 108 and a contact layer 109; etching the laminate so that a plurality of emission mesas being a plurality of light emission parts and having the selectively oxidized layer exposed at the side surface are formed; forming an interlayer insulating film 111 on the plurality of mesas and on the peripheral region thereof; and selectively wet etching the interlayer insulating film after forming a resist pattern on the interlayer insulating film. In the step of wet etching, the interlayer insulating film formed in the peripheral region is partially removed, and a plurality of inspection openings 150 for performing visual inspection of the contact layer are formed. |
