| 摘要 |
PROBLEM TO BE SOLVED: To provide a control method of a target supply device capable of appropriately outputting a target substance.SOLUTION: The target supply device includes: a target generator which is equipped with an EUV light generator including an image sensor, has a nozzle, and stores a target substance internally; and a pressure control section for controlling the pressure in the target generator. The control method of the target supply device may include the steps of: outputting the target substance in the target generator from a nozzle hole of the nozzle by applying pressure to inside of the target generator with the pressure control section by using the target supply device; determining whether or not a difference between the output direction and the setting direction of the target substance to be outputted from the nozzle hole which is detected by the image sensor is within a predetermined range; and maintaining the pressure in the target generator by the pressure control section until the difference between the output direction and the setting direction falls in the predetermined range. |
