发明名称 |
APPARATUS FOR AND METHOD OF DRAWING |
摘要 |
A drawing apparatus accepts a selection manipulation for selecting the type of shape of a light outgoing ratio function defining a relationship between the position of modulation units included in an optical unit as seen in the direction of the arrangement of the modulation units and a light outgoing ratio from among a plurality of shape type candidates. The drawing apparatus then adjusts the light outgoing ratio of each of the modulation units in accordance with the accepted shape type. While emitting a beam of drawing light of a strip-shaped cross-sectional configuration from the optical unit, the drawing apparatus moves the optical unit relative to a substrate in a direction orthogonal to the direction of the longer dimension of the strip-shaped cross section of the drawing light beam to perform a drawing process on the substrate. |
申请公布号 |
US2014084184(A1) |
申请公布日期 |
2014.03.27 |
申请号 |
US201313912323 |
申请日期 |
2013.06.07 |
申请人 |
DAINIPPON SCREEN MFG. CO., LTD. |
发明人 |
HONJO YOSHINORI;UESATO MAKOTO |
分类号 |
H01L21/268 |
主分类号 |
H01L21/268 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|