发明名称 |
APPARATUS AND METHOD FOR IRRADIATING |
摘要 |
A method irradiates a wafer and an apparatus provides for a wafer to be irradiated. A plurality of radiation emitters emit radiation. A mask permits a portion of the electromagnetic radiation from the plurality of radiation emitters to pass and blocks a further portion of said electromagnetic radiation from passing. |
申请公布号 |
WO2014047415(A1) |
申请公布日期 |
2014.03.27 |
申请号 |
WO2013US60862 |
申请日期 |
2013.09.20 |
申请人 |
INTEST CORPORATION |
发明人 |
DIMITRIADIS, THOMAS, CHRIST |
分类号 |
G03F7/20 |
主分类号 |
G03F7/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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