发明名称 |
METHOD FOR TEMPERATURE COMPENSATION IN SENSOR, COMPUTATION PROGRAM FOR METHOD FOR TEMPERATURE COMPENSATION, COMPUTATION PROCESSING DEVICE, AND SENSOR |
摘要 |
Temperature compensation is performed using a computation program for temperature compensation, a computation processing, and a sensor. Deformation in a diaphragm caused by a pressure change due to the temperature of the gas in a cavity is cancelled out, and deformation of the diaphragm is minimized within the target temperature range, thereby allowing an optimum temperature compensation to be performed. The temperature compensation in a capacitance-type sensor executes calculation steps which include including a calculation step (S17) of acquiring the amount of changeΔC′in capacitance. A parameterΔC′is obtained, through which it is possible to determine the degree of compensation for the deformation in the diaphragm section caused by a pressure change due to the temperature changes of the gas in the hermetically sealed space. |
申请公布号 |
US2014088890(A1) |
申请公布日期 |
2014.03.27 |
申请号 |
US201214123118 |
申请日期 |
2012.05.31 |
申请人 |
HAO XIUCHUN;JIANG YONGGANG;FUJITA TAKAYUKI;HIGUCHI KOHEI;MAENAKA KAZUSUKE;TAKAO HIDEKUNI;JAPAN SCIENCE AND TECHNOLOGY AGENCY |
发明人 |
HAO XIUCHUN;JIANG YONGGANG;FUJITA TAKAYUKI;HIGUCHI KOHEI;MAENAKA KAZUSUKE;TAKAO HIDEKUNI |
分类号 |
G01L9/12 |
主分类号 |
G01L9/12 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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