| 摘要 |
PROBLEM TO BE SOLVED: To provide a suction chuck configured to provide a simple compressed-air supply path for each nozzle.SOLUTION: A suction chuck includes a planar main body having an opposing surface 31 opposing a workpiece. A plurality of suction elements injecting gas from the opposing surface 31; a supply path supplying compressed air to each suction element; and a plurality of exhaust holes penetrating the main body in a thickness direction are formed in the main body. Each suction element includes: a cylindrical space 45 including a circular injection port 41 opened to the opposing surface 31; and a plurality of nozzles 44 opened to an inner circumferential wall of the cylindrical space 45. The supply path includes: a distribution path 62 distributing the compressed air to each of the nozzles 44; and a common supply path 47 supplying the compressed air to the distribution path 62. The suction elements, the distribution path 62, and the common supply path 47 are formed on different metal plates, respectively. |
