发明名称 |
PIEZOELECTRIC ACTUATOR AND OPTICAL SCANNING APPARATUS HAVING A PLURALITY OF PIEZOELECTRIC LAYERS |
摘要 |
A piezoelectric actuator includes a plurality of piezoelectric layers, a plurality of electrodes between which each of the piezoelectric layers is placed so that the electrodes and the piezoelectric layers alternate with each other, and a substrate on which the plurality of piezoelectric layers and the plurality of electrodes are formed. |
申请公布号 |
US2014085694(A1) |
申请公布日期 |
2014.03.27 |
申请号 |
US201314032732 |
申请日期 |
2013.09.20 |
申请人 |
AGA HISANORI;SUGIYAMA AYU;MITSUMI ELECTRIC CO., LTD. |
发明人 |
AGA HISANORI;SUGIYAMA AYU |
分类号 |
G02B26/10;H01L41/047 |
主分类号 |
G02B26/10 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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