发明名称 PIEZOELECTRIC ACTUATOR AND OPTICAL SCANNING APPARATUS HAVING A PLURALITY OF PIEZOELECTRIC LAYERS
摘要 A piezoelectric actuator includes a plurality of piezoelectric layers, a plurality of electrodes between which each of the piezoelectric layers is placed so that the electrodes and the piezoelectric layers alternate with each other, and a substrate on which the plurality of piezoelectric layers and the plurality of electrodes are formed.
申请公布号 US2014085694(A1) 申请公布日期 2014.03.27
申请号 US201314032732 申请日期 2013.09.20
申请人 AGA HISANORI;SUGIYAMA AYU;MITSUMI ELECTRIC CO., LTD. 发明人 AGA HISANORI;SUGIYAMA AYU
分类号 G02B26/10;H01L41/047 主分类号 G02B26/10
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