发明名称 |
Method for fabricating oxide-confined vertical-cavity surface-emitting laser |
摘要 |
The present invention discloses a method for fabricating a heat-resistant, humidity-resistant oxide-confined vertical-cavity surface-emitting laser (VCSEL) by slowing down the oxidizing rate during a VCSEL oxidation process to thereby reduce stress concentration of an oxidation layer and by preventing moisture invasion using a passivation layer disposed on a laser window. The VCSEL device thus fabricated is heat-resistant, humidity-resistant, and highly reliable. In a preferred embodiment, the oxidation process takes place at an oxidizing rate of less than 0.4μm/min, and the passivation layer is a SiON passivation layer. |
申请公布号 |
US8679873(B2) |
申请公布日期 |
2014.03.25 |
申请号 |
US20090653349 |
申请日期 |
2009.12.11 |
申请人 |
PAN JIN SHAN;WU CHENG JU;WU I HAN;TSENG KUO FONG;TRUELIGHT CORP. |
发明人 |
PAN JIN SHAN;WU CHENG JU;WU I HAN;TSENG KUO FONG |
分类号 |
H01L21/00;H01L33/00;H01S3/04;H01S5/00 |
主分类号 |
H01L21/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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