Precision driver circuits for micro-electro-mechanical system

摘要

There is disclosed a driver circuits and method for driving a micro-electro-mechanical system. A driver circuit may include a converter to convert a digital input value into a pulse-width modulated signal with precise amplitude. A low pass filter may extract an average DC component of the pulse-width modulated signal. An amplifier may amplify the average DC component to provide an output voltage to drive the MEMS.