SPECIMEN OBSERVATION METHOD AND DEVICE, AND INSPECTION METHOD AND DEVICE USING THEM

摘要

PROBLEM TO BE SOLVED: To provide a technique capable of improving observation ability of a specimen using an electron beam in an energy region conventionally not interested.SOLUTION: The sample observation method comprises: irradiating a specimen with an electron beam; detecting electrons to be observed generated by the irradiation with the electron beam and having information on the specimen; and forming an image of the specimen from the detected electrons to be observed. The irradiation with the electron beam intermingles secondary emission electrons and mirror electrons as the electrons to be observed by irradiating the specimen with the electron beam having landing energy set in a transition region between a secondary emission electron region where the secondary emission electrons are detected, and a mirror electron region where the mirror electrons are detected. The electrons to be observed are detected in the state where the secondary emission electrons and the mirror electrons are intermingled. A fine foreign matter or pattern of 100 nm or less can be observed and inspected at a high speed.