SURFACE MODIFICATION OF NANOSTRUCTURE USING POLY(ETHYLENE GLYCOL) AND MANUFATURING NANOFLUIDIC DEVICES USING THE SAME

摘要

A method of manufacturing a nanostructure can comprise: a step of binding layer comprising polyethylene glycol (PEG) coupled with a function group on the upper substrate formed with polymer material; and a step of binding for binding the upper substrate with the lower substrate using the binding layer. At this time, a nanochannel can be defined by a dented area between the upper substrate and the lower substrate. Coating the surface of the upper substrate with PEG before binding the upper substrate with the lower substrate allows the coating of the surface of the nanochannel and the binding between the substrates to be performed in one process, and allows biofouling with respect to the surface to be prevented by reducing non-specific bindings while maintaining hydrophilicity of the surface of the nanochannel, as well as allows electroosmotic flow within the nanochannel to be reduced.