发明名称 SEMICONDUCTOR DEVICE AND METHOD OF TESTING THE SAME, AND METHOD OF MANUFACTURING THE SAME
摘要 PROBLEM TO BE SOLVED: To enable required electrical stress to be applied to an electrode layer forming a wiring pattern.SOLUTION: In a semiconductor chip 1, a first wiring layer 4, a testing conductor layer 6, and a second wiring layer 8 are formed on a semiconductor substrate 2 each via an insulating film. The testing conductor layer 6 is formed on almost the whole surface so as to cover a region where the first wiring layer 4 and the second wiring layer 8 are opposed to each other. The testing conductor layer 6 is connected to an electrode E3, and has such a configuration that the testing conductor layer 6 and the electrode E3 can be set to the same potential. Thereby, by applying voltage stress between the testing conductor layer 6 and the first wiring layer 4 or the second wiring layer 8 at inspection, failures can be determined when a foreign matter 12 or the like exists, and a screening test can be performed with certainty.
申请公布号 JP2014049471(A) 申请公布日期 2014.03.17
申请号 JP20120188735 申请日期 2012.08.29
申请人 DENSO CORP 发明人 MORI YASUHIRO
分类号 H01L21/3205;H01L21/768;H01L23/522 主分类号 H01L21/3205
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