发明名称 GROUP III NITRIDE SEMICONDUCTOR CRYSTAL, GROUP III NITRIDE SEMICONDUCTOR SUBSTRATE, GROUP III NITRIDE SEMICONDUCTOR FREESTANDING SUBSTRATE, NITRIDE SEMICONDUCTOR DEVICE, AND RECTIFIER DIODE
摘要 There is provided a group III nitride semiconductor crystal, containing a donor-type impurity and having a hydrogen concentration of 2.0E+16 cm-3 or less in a crystal.
申请公布号 US2014070371(A1) 申请公布日期 2014.03.13
申请号 US201314020207 申请日期 2013.09.06
申请人 HITACHI METALS, LTD. 发明人 TSUCHIYA TADAYOSHI;KANEDA NAOKI
分类号 H01L29/20 主分类号 H01L29/20
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