发明名称 Film coating plant for packaging e.g. chips, has heated shells which are arranged between electrodes to receive clamping metal, and clamping device that is arranged within vacuum chamber to bias first electrode towards second electrode
摘要 <p>The film coating plant (10) has a vacuum chamber (12) which is provided with a vaporizer (22) having a metal bath (23) to generate metal vapor. A film (24) is guided on a coating roller (18) over the vaporizer to perform vapor deposition of metal. One side of vaporizer is provided with first electrodes while other side is provided with second electrodes. Heated shells are arranged between electrodes to receive clamping metal. A clamping device is arranged within vacuum chamber to bias first electrode towards second electrode.</p>
申请公布号 DE102012108441(A1) 申请公布日期 2014.03.13
申请号 DE201210108441 申请日期 2012.09.11
申请人 SCHMID VACUUM TECHNOLOGY GMBH 发明人 LEFEBVRE, RENE MARIE;HOFFMANN, JOSEF;KRANTZ, JOHANNES
分类号 C23C14/26 主分类号 C23C14/26
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