发明名称 Methods for tunable plating seed step coverage
摘要 A writer main pole for a perpendicular magnetic recording system is provided. The writer pole has a tunable bottom gap to side gap ratio, and may be formed using deposition of a first seed layer through an ion beam deposition process, deposition of a second seed layer through a physical vapor deposition process, and deposition of a non-magnetic gap layer through a chemical vapor deposition process.
申请公布号 US8670213(B1) 申请公布日期 2014.03.11
申请号 US201213422997 申请日期 2012.03.16
申请人 ZENG WANXUE;SI WEIMIN;HONG YING;BAI ZHIGANG;WESTERN DIGITAL (FREMONT), LLC 发明人 ZENG WANXUE;SI WEIMIN;HONG YING;BAI ZHIGANG
分类号 G11B5/23;B44C1/22 主分类号 G11B5/23
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