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发明名称
基板处理装置及基板冷却方法
摘要
申请公布号
TWI429873
申请公布日期
2014.03.11
申请号
TW100123207
申请日期
2011.06.30
申请人
爱发科股份有限公司 日本
发明人
藤井佳词
分类号
F27D9/00
主分类号
F27D9/00
代理机构
代理人
陈长文 台北市松山区敦化北路201号7楼
主权项
地址
日本
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