| 摘要 |
PURPOSE: An exposing apparatus, an exposing method, and a method for manufacturing a device are provided to maintain the processing amount of the exposing apparatus and cost effectively manufacture devices with the high quality. CONSTITUTION: An exposing apparatus(1) includes a projection optical system(10) projecting the pattern of a mask(23) on the surface of a substrate. A driving part(60) drives a chuck(35) supporting the substrate. A measuring part(70) measures the height of the substrate at a plurality of points. A controlling part(80) controls a height measuring process and a chuck driving process. |
