| 发明名称 |
FILM THICKNESS MEASUREMENT DEVICE |
| 摘要 |
<p>A measurement head (32) irradiates a primary X-ray to a film (12) for a product substrate (10), and detects fluorescent X-rays from the film (12). An analysis means (33) finds the film (12) thickness from the strength of the fluorescent X-rays detected by the measurement head (23).</p> |
| 申请公布号 |
WO2014034565(A1) |
申请公布日期 |
2014.03.06 |
| 申请号 |
WO2013JP72583 |
申请日期 |
2013.08.23 |
| 申请人 |
SHARP KABUSHIKI KAISHA |
发明人 |
HOHSHI, NORIKAZU;SAKAGAMI, HIDEKAZU;HARADA, NARUMI;YAMAWAKI, CHIAKI |
| 分类号 |
G01B15/02 |
主分类号 |
G01B15/02 |
| 代理机构 |
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代理人 |
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| 主权项 |
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