发明名称 SEMICONDUCTOR APPARATUS AND TEST METHOD THEREOF
摘要 A semiconductor apparatus includes a chip containing a plurality of through-vias, a test voltage input unit, and a test result reception unit. The test voltage input unit applies a test voltage to one of the plurality of through-vias. The test result reception unit receives an output signal outputted from one or more of the plurality of through-vias.
申请公布号 US2014062523(A1) 申请公布日期 2014.03.06
申请号 US201213720683 申请日期 2012.12.19
申请人 SK HYNIX INC. 发明人 JEONG CHUN SEOK;PARK KEE TEOK
分类号 H01L23/48;G01R31/26 主分类号 H01L23/48
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