TRANSMISSION DEVICE, DRAWING DEVICE, AND ARTICLE MANUFACTURING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a technique advantageous for transmitting optical signals for controlling drawing in a vacuum container.SOLUTION: A transmission device for transmitting optical signals between outside and inside of a vacuum container includes: plural first transmission members for transmitting plural optical signals outside the vacuum container; plural second transmission members for transmitting plural optical signals inside the vacuum container; and a light transmission member for transmitting optical signals between the plural first transmission members and the plural second transmission members. The light transmission member has a structure formed to separate optical paths of the plural optical signals between the plural first transmission members and the plural second transmission members from each other.