| 摘要 |
PROBLEM TO BE SOLVED: To precisely replace a carrier held in an improper carrier holding shelf of a carrier storage to a proper carrier holding shelf.SOLUTION: After moving a carrier holding stage 35 to a position facing to a carrier holding shelf 27b, a carrier 23c is pulled out from a carrier holding shelf 27b and moved on the carrier holding stage 35. Subsequently, after raising the carrier holding stage 35 up to a position facing to a carrier temporal shelf 28, the carrier 23c is moved to the carrier temporal shelf 28. Subsequently, lowering the carrier holding stage 35 down to a position facing to a carrier holding shelf 27d, the carrier 23b is pulled out from the carrier holding shelf 27d. And subsequently, after raising the carrier holding stage 35 up to a position facing to a carrier holding shelf 27b, the carrier 23b is transferred onto the carrier holding shelf 27b. Thus, the carrier holding shelf 27b holds the carrier 23b according to a catering data 61a. |
