ROBOT INCLUDING END EFFECTOR AND OPERATION METHOD OF THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a robot including an end effector which can improve throughput of substrate transfer and has high flexibility in an operation method of the substrate transfer, and to provide an operation method of the robot.SOLUTION: End factors 6 and 7 structured to be mounted on arms 4 and 5 of a robot 1 include: a plurality of blade members which can hold substrates W respectively and can change blade intervals of the blade members; a blade supporting section 8 for supporting the plurality of blade members and are integrally driven with the plurality of blade members by the robot 1; and blade driving means for moving at least one of the plurality of blade members to the other blade member and changing the blade intervals.