Aerostatically guided table system for vacuum application

摘要

#CMT# #/CMT# The table system (1) has a base plate (2) and a moving table guided by aerostatic bearing units (10). The aerostatic bearing units are constructed partially as swivel joints, where a push rod (4) which is actuated by a drive (5) for guiding the moving table laterally is connected to the rotating part of each swivel joint, and in that the push rods are hollow and constitute a component part of the suction lines for extracting the operating gas. #CMT#USE : #/CMT# Table system for vacuum application. #CMT#ADVANTAGE : #/CMT# The aerostatic bearing units are constructed partially as swivel joints, where a push rod which is actuated by a drive for guiding the moving table laterally is connected to the rotating part of each swivel joint, and in that the push rods are hollow and constitute a component part of the suction lines for extracting the operating gas, and thus provides a dynamic table system with high stiffness. #CMT#DESCRIPTION OF DRAWINGS : #/CMT# The drawing shows a perspective view of a table system. 1 : Table system 2 : Base plate 4 : Push rod 5 : Drive 10 : Aerostatic bearing units.