| 摘要 |
A method for manufacturing an imprint stamp is provided to reduce a production cost of a stamp by using a glass substrate instead of expensive quartz, and to form a pattern on a glass substrate faster than a dry etching method. A method for manufacturing an imprint stamp includes the steps of: forming a photoresist layer(11) on the upside of a glass substrate(10); irradiating the formed photoresist layer with a laser having a higher etch rate for the glass substrate than a dry etching method to form the same pattern on the photoresist layer and the upside of the glass substrate; dry-etching the glass substrate to provide an upright profile of the pattern formed on the glass substrate using the pattered photoresist layer as a mask; and removing the photoresist layer from the substrate. |
