发明名称 A RESIST STRIPPING SOLUTION AND A RESIST STRIP PROCESS
摘要 <p>A resist stripping solution for stripping a resist on a substrate, being prepared in a non-aqueous condition, the resist stripping solution comprising: a first water-soluble organic solvent occupying 80 to 90% by mass of the resist stripping solution; a second water-soluble organic solvent occupying 1 to 15% by mass of the resist stripping solution; and an amino alcohol compound represented occupying 1 to 15% by mass of the resist stripping solution.</p>
申请公布号 WO2014030687(A1) 申请公布日期 2014.02.27
申请号 WO2013JP72340 申请日期 2013.08.15
申请人 FUJIFILM CORPORATION 发明人 KAMIMURA, TETSUYA
分类号 G03F7/42;H01L21/027 主分类号 G03F7/42
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