| 摘要 |
PROBLEM TO BE SOLVED: To provide a method in which an evaporation rate can be precisely controlled irrespective of the distance between a base material and an evaporation source, so that a compound solar cell having a stable quality can be efficiently manufactured.SOLUTION: A long base material 1 in which an opening 30 for detecting an evaporation rate is formed is prepared, evaporation sources 18, 19, 20 for supplying a compound semiconductor layer forming material to be evaporated are provided in the vicinity of the base material 1, and evaporation rate detection means 21, 22, 23 are provided on the opposite side of the evaporation sources while sandwiching the base material 1. When a compound semiconductor layer is formed while the base material 1 is transported, a part of the compound semiconductor layer forming material supplied from the evaporation sources 18, 19, 20 is made to reach the evaporation rate detection means 21, 22, 23 through the opening 30 to control an evaporation rate. |
