| 摘要 |
A method and an apparatus for inspecting a substrate by using high reflection and transmission efficiency and retardation of transmission light are provided to perform inspection by performing retardation of transmission light like a function of LC after attachment previously before the attachment, thereby performing inspecting under environment similar to environment after attachment when inspecting the substrate before attachment. A polarizing unit(133) for passing through light of a specific vibration direction, a retardation unit(134) for generating retardation of two vibration direction components of light, and a magic mirror(135) having predetermined light reflectivity and transmittance are sequentially contacted. A substrate(123) is placed on the magic mirror. Light is radiated from a lower part of the polarizing unit. By the light radiated from the lower part of the polarizing unit, light(138) transmitted after passing through the substrate is inspected. |
