发明名称 Atmospheric pressure plasma device using strip electrode arrays
摘要 PURPOSE: An atmospheric pressure plasma projection device using an electrode arrangement of small line width is provided to have a projection range of a wide area. CONSTITUTION: An upper substrate (22) and a lower substrate (20) have a strip electrode (23) formed on a surface which gas flows. A partition maintaining layer (21) is located between the upper substrate and the lower substrate. The partition maintaining layer makes a gas passage. An external ground electrode (24) is located on the outside of the upper substrate and the lower substrate. The external ground electrode controls discharge according to an angle with a direction of a radiation surface.
申请公布号 KR101366106(B1) 申请公布日期 2014.02.26
申请号 KR20120032331 申请日期 2012.03.29
申请人 发明人
分类号 H01J37/32;H01L21/3065;H05H1/46 主分类号 H01J37/32
代理机构 代理人
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